Vacuum Environment Solutions

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Kingsni offers specialized motion control solutions designed for high and ultra‑high vacuum environments down to 10⁻⁸ Pa. Our vacuum‑compatible stepper motors and servo motors feature low‑outgassing materials, high‑temperature resistance (up to +260°C), and proven reliability under thermal cycling and radiation exposure. These solutions are ideal for semiconductor manufacturing, space simulation chambers, vacuum coating, vacuum welding, and research instrumentation. All products meet IEC60068 and GJB150 standards, with third‑party verified performance. Explore our range to achieve precise, contamination‑free motion in your most demanding vacuum applications.

KVM Series Vacuum Stepper Motors | Designed for Vacuum Coating Equipment

2026-06-03

Stepper motors for operations in vacuum, cryogenic, high temperature and radiation applications
Vacuum: up to 10^-7Pa
Operating temperature: down to -196℃ , up to 200℃
Radiation resistance: up to 10⁶Gy
Motor Flange: 28/42/57/86mm ( Nema 11/17/23/34）
Holding torque: 0.04 to 4.4Nm
Basic step angle: 1.8° with accuracy of 5%
Lubrication: grease or dry lubrication
Optional:
resolver feedback, safe brake, double shaft, modified shaft

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KSSM Series Vacuum Servo Motor | Applied in Vacuum Optical Sputtering

2026-06-11

Vacuum: up to 10^-7Pa
Cryo-temperature: down to -196℃
High temperature: up to 260°C
Radiation resistance: up to 10⁶Gy
Rated power: 400/750/1800/3800W
Rated torque: 0.32Nm to 15Nm
Rated speed: 2500rpm or 3000rpm
Winding voltage: 48VDC, 110VDC, 220VAC, or 380VAC
Feedback device: resolver
Flange dimension: 60/80/110/130mm

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KECM Series Vacuum High and Low Temperature Servo Motor | Applied in Ion Beam Sputtering Process

2026-05-06

Servo motors for operations in vacuum, cryogenic and high temperature applications
Vacuum: up to 10^-3Pa
Operating temperature: down to -60℃ , up to 120℃
Rated power: 100/200/400/750/1000/1800/3800W
Winding voltage: 24VDC/48VDC/220VAC/380VAC
Feedback device: resolver, geared multi-turn absolute encoder
Options: safe brake

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Servo Drives | Designed for Vacuum Environments

2026-04-15

Multiple Control Interfaces: Featuring pulse/direction, RS485 (Modbus RTU), EtherCAT, and CANopen, this servo drive enables seamless communication and precise command delivery to connected servo motors.
Wide Environmental Adaptability: Engineered for reliability across different settings, this servo drive operates in standard environments (0–40°C) as well as extreme conditions (-40 to +70°C, 95% humidity, vibration, and shock), ensuring consistent performance when paired with compatible servo motors.
Versatile Power Options: This servo drive supports DC24/48V and AC220/380V inputs, providing flexible power solutions for a wide range of servo motors across different system architectures.
Diverse Command Modes: In addition to digital communication, this servo drive supports analog voltage control for speed or torque, offering versatile operation modes to suit various servo motor applications.
Flexible Feedback Compatibility: Designed to work with both resolver and multi-turn absolute encoder feedback, this servo drive ensures accurate position, speed, and torque control for KECM and KSSM series servo motors.CANopen

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KLA-AC-600 Vacuum Micro Electric Actuator | Precision Adjustment in Vacuum Chamber

2026-06-24

Vacuum level: 10^-9Pa（optional）
Ambient temperature: Minimum -80°C, Maximum +200°C
Radiation resistance: 1x10⁶Gy（optional）
Motion resolution: Approx. 1 nm
Minimum step size: ≤20 nm

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KLS Series Vacuum Linear Module | Used for Optical Coating

2026-06-24

Stepper motors for operations in vacuum, cryogenic, high temperature and radiation applications
Vacuum: up to 10^-7Pa
Operating temperature: down to -196°C, up to 200°C
Radiation resistance: up to 10⁶Gy
Base width: 30/40/60/80/135/170mm
Maximum load capacity: 150Kg horizontal , 100Kg vertical
Repeatability: ±0.01mm